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MOS capacitor/Bibliography

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A list of key readings about MOS capacitor.
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EH Nicollian, JR Brews (2003). MOS physics and technology, reprint of 1982 edition as a Wiley Classic. Wiley. ISBN 047143079X.  This book is rather old, but it contains a much more detailed presentation than more recent texts, and EH Nicollian was a pioneer in interface trap measurements.